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Spatially resolved measurements of ion density and electron temperature

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Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:J. Vac. Sci. Technol. A

Volume:29

Issue:1

Page Number:11006-11006

Pre One:Study on Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model

Next One:Numerical Simulation of Pulse-modulated Radio-frequency Atmospheric Pressure Dielectric Barrier Discharge
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