location： Current position: Home >> Scientific Research >> Paper Publications

Mode transition in CF41 Ar inductively coupled plasma

Hits:

Indexed by:期刊论文

Date of Publication:2013-01-01

Journal:PHYSICS OF PLASMAS

Volume:20

Issue:12

Page Number:123513-123513

Pre One:Experimental and numerical investigations of electron density

Next One:Study of the neutral gas flow on discharges of capacitively coupled plasma in a PECVD reactorVacuum
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep