Hits:
Indexed by:期刊论文
Date of Publication:2015-01-01
Journal:原子核物理评论
Included Journals:PKU、ISTIC
Volume:32
Issue:6
Page Number:84-88
Pre One:脉冲调制射频容性耦合SiH4/Ar放电混合模拟研究
Next One:感应耦合等离子体源离子掺杂的流体模拟研究