Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2015-01-01
Journal: J. Appl. Phys.
Volume: 117
Issue: 14
Page Number: 143301-143301