CGI4whTiqFL60oaCwSMksGx2ahIOdH73yM3NO88CQcI0QXc4TX6dyFv9F56c
Current position: Home >> Scientific Research >> Paper Publications

Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma

Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2018-01-01

Journal: J. Appl. Phys.

Volume: 125

Page Number: 23303-23303

Prev One:Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region

Next One:The effect of He ions irradiation on the micro-structure and propertyof CLF-1 steel
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep