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Indexed by:期刊论文

Date of Publication:2012-11-01

Journal:PHYSICS OF PLASMAS

Included Journals:SCIE、EI、Scopus

Volume:19

Issue:11

ISSN No.:1070-664X

Abstract:We developed a one-dimensional hybrid model to simulate the dc/RF combined driven capacitively coupled plasma for CF4 discharges. The numerical results show the influence of the dc source on the plasma density distribution, ion energy distributions (IEDs), and ion angle distributions (IADs) on both RF and dc electrodes. The increase of dc voltage impels more ions with high energy to the electrode applied to the dc source, which makes the IEDs at the dc electrode shift toward higher energy and the peaks in IADs shift toward the small angle region. At the same time, it also decreases ion-energy at the RF electrode and enlarges the ion-angles which strike the RF electrode. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4768427]