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Indexed by:期刊论文

Date of Publication:2012-07-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI、ISTIC、Scopus

Volume:21

Issue:7

ISSN No.:1674-1056

Key Words:mode transition; inductively coupled plasma; Langmuir probe; ICCD

Abstract:A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.