Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2011-07-27

Journal: PHYSICAL REVIEW LETTERS

Included Journals: PubMed、EI、SCIE、Scopus

Volume: 107

Issue: 5

Page Number: 055002

ISSN: 0031-9007

Abstract: We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.