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Indexed by:期刊论文

Date of Publication:2011-06-01

Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Included Journals:Scopus、SCIE、EI

Volume:20

Issue:3,SI

ISSN No.:0963-0252

Abstract:With an implicit particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show complex relations to the electrode areas. Two-dimensional kinetic effects are also illuminated. Compared with the fluid model, PIC/MC model is numerical-diffusion-free and more detailed properties of the plasmas can be shown.