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Indexed by:期刊论文

Date of Publication:2009-04-15

Journal:JOURNAL OF APPLIED PHYSICS

Included Journals:SCIE、EI

Volume:105

Issue:8

ISSN No.:0021-8979

Key Words:discharges (electric); plasma density; plasma instability; plasma simulation; plasma temperature

Abstract:One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.