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论文类型：期刊论文

发表时间：2017-12-13

发表刊物：JOURNAL OF PHYSICS D-APPLIED PHYSICS

收录刊物：SCIE、EI

卷号：50

期号：49

ISSN号：0022-3727

关键字：asymmetric capacitive discharge; standing waves and wave-induced hysteresis; two-dimensional particle-in-cell simulations; lumped circuit model

摘要：Asymmetrically excited, high frequency cylindrical capacitive discharges are widely used for materials etching and thin film deposition. Two-dimensional (2D) electrostatic particle-in-cell (PIC) simulations show the existence of standing waves and wave-induced hysteresis of the plasma density, i.e. two different steady states for the same driving rf voltage amplitude, when the voltage is increased from a low value or decreased from a high value. The phenomenon is explored over a range of pressures (10-30 mTorr) and frequencies (60-80 MHz). Examined at 73 MHz, with increasing gas pressure, the hysteresis loop gradually shrinks and vanishes. To understand the hysteresis induced by z-symmetric and z-antisymmetric radial wave propagation modes, the PIC results are compared with a nonlinear transmission line model assuming uniform bulk plasma density, to determine the symmetric and antisymmetric voltage amplitudes. The model results are in good agreement with the PIC observations, showing central-low and central-high profiles of the antisymmetric mode voltage at low density and high density, respectively. The results are then used to determine the parameters of a lumped circuit model of the two modes, from which the hysteresis is induced by the density dependence of the symmetric and anti-symmetric wave mode absorbed electron powers. For the low density state, the discharge is sustained mainly by the symmetric mode excitation. At high density, the discharge is sustained by both symmetric and anti-symmetric modes, with the latter partly showing a spatial resonance. The results are also shown to be frequency dependent, with an onset of the hysteresis at about 66 MHz.