大连理工大学主页平台管理系统王友年--中文主页-- Influence of ion species ratio on the characteristic of sheath with dielectric target for plasma source ion implantation

王友年

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Influence of ion species ratio on the characteristic of sheath with dielectric target for plasma source ion implantation

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论文类型：会议论文

发表时间：2008-01-01

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