王友年
开通时间:..
最后更新时间:..
点击次数:
论文类型:期刊论文
发表时间:2017-01-01
发表刊物:Nuclear Instruments and Methods in Physics Research, Section B
卷号:406
页面范围:548-554
上一条:Effect on structure and mechanical property of tungsten irradiated by
下一条:Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveforms