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论文类型：期刊论文

发表时间：2017-04-01

发表刊物：PLASMA PROCESSES AND POLYMERS

收录刊物：SCIE、EI

卷号：14

期号：4-5,SI

ISSN号：1612-8850

关键字：argon/oxygen discharge; biased inductively coupled plasma; fluid sheath model; global model; ion energy and angular distribution

摘要：In this work, a global bulk plasma model coupled bi-directionally with a Monte-Carlo/fluid sheath model was developed for electronegative Ar/O-2 inductive discharges, to explore the ion energy function (IEDF) and angular distributions function (IADF) bombarding an rf-biased electrode. At low bias voltage, the IEDF of Ar+ shows a single energy peak that transforms into a bimodal distribution with increasing bias voltage. The IEDFs of O-2(+) and O+ are always bimodal. The ion energy peak separation width largely depends on the ion masses. The IADFs are affected by the bias voltage, pressures and coil powers. The results at different coil powers indicate the importance of considering the collisions induced by atoms, especially in a a molecular gas.