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发布时间：2019-03-13

论文类型：期刊论文

发表时间：2016-03-21

发表刊物：JOURNAL OF APPLIED PHYSICS

收录刊物：Scopus、EI、SCIE

卷号：119

期号：11

ISSN号：0021-8979

摘要：Neutral temperature T-g in capacitively coupled argon plasmas was measured by using a fiber Bragg grating sensor. The measurement of T-g is based on the thermal equilibrium process between the sensor and neutral gases, which is found to become fast upon increasing pressure, due to enhanced heat conduction. Additionally, T-g was found to increase with increasing high frequency power due to enhancive collisions with charged particles. It is also observed that T-g exhibits a significant gradient in space, ranging from 10 to 120 degrees C higher than room temperature for the conditions investigated. In addition, the spatial profiles of T-g at different pressures generally resemble those of the Ar+ density n(i), measured with a floating double probe. The neutral gas is mainly heated via elastic collisions with ions in the sheath region followed by heat conduction among neutrals. (C) 2016 AIP Publishing LLC.