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论文类型：期刊论文

发表时间：2021-01-25

发表刊物：PLASMA SOURCES SCIENCE & TECHNOLOGY

卷号：24

期号：3

ISSN号：0963-0252

关键字：capacitively coupled plasmas; electron heating mode transition; phase resolved optical emission spectroscopy; particle in cell simulation

摘要：The electron heating mode transitions in capacitively coupled CF4 discharges were studied by synergistically using two diagnostic methods in combination with Particle-in-Cell/Monte Carlo collision (PIC/MCC) simulations. Based on the method of phase resolved optical emission spectroscopy of trace rare gas, the spatiotemporal evolutions of energetic electrons were presented. The time-average electron density at the discharge center was measured by using a hairpin probe. All the experimental results were compared with those obtained from PIC/MCC simulations. Two different electron heating modes were observed depending on the discharge conditions: (1) the a mode (or electropositive mode), in which the electron heating maximum occurs near the sheath boundary, dominated by the sheath electric field during its expansion phase, (2) the drift-ambipolar (DA) mode (or electronegative mode), in which the electron heating maxima occur inside the entire bulk plasma and near the collapsing sheath edge, dominated by the drift field inside the bulk and the ambipolar fields near the collapsing sheath edge, respectively. The transitions between the two modes were presented when changing the rf power, working pressure and driving frequency.
   By increasing the power, the heating mode experiences a transition from DA to a mode. This is ascribed to the fact that at high powers, the sheath heating is enhanced, leading to a drastic decrease in the electronegativity, and consequently the DA electric field is significantly reduced. By increasing the pressure, a heating mode transition from a pure a mode, then a combination of a and DA modes, finally into a DA mode is induced. We found that the mode transition is much more sensitive to the change of working pressure than that of rf power. When increasing the pressure, there is an evident enhancement in the electron attachment, which can generate the negative ions and deplete the electrons, resulting in a higher electronegativity as well as a higher DA field, and therefore the excitation and ionization in the bulk are enhanced. The driving frequency is found to significantly affect the electronegativity, i.e. as the driving frequency increases, the discharge becomes more electropositive, and the sheath heating (alpha mode) dominates. Furthermore, we conclude that as the driving frequency is increased, the pressure, at which the mode transition occurs, is increased, while the power, at which the mode transition occurs, is decreased.