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论文类型：期刊论文

发表时间：2012-07-01

发表刊物：CHINESE PHYSICS B

收录刊物：SCIE、EI、ISTIC、Scopus

卷号：21

期号：7

ISSN号：1674-1056

关键字：mode transition; inductively coupled plasma; Langmuir probe; ICCD

摘要：A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.