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论文类型：期刊论文

发表时间：2011-07-01

发表刊物：CHINESE PHYSICS LETTERS

收录刊物：Scopus、SCIE、ISTIC

卷号：28

期号：7

ISSN号：0256-307X

摘要：A fluid radio-frequency (rf) sheath model coupled to an equivalent circuit method is adopted to describe the nonlinear series resonance effects due to nonlinear interaction of plasma bulk and sheath in asymmetric capacitive discharges. With the fluid sheath model, we can determine self-consistently the relationship between the instantaneous potential drop across the rf sheath and the instantaneous sheath thickness. The numerical results demonstrate that the self-excitation of the plasma series resonance significantly enhances both ohmic heating and stochastic heating. Also, we observe that the effects of nonlinear series resonance increases the total power dissipation by factors of 2-5 for low pressure capacitive plasmas. Furthermore, we find that the largest harmonic is about 13 for the plasma current.