点击次数：

论文类型：期刊论文

发表时间：2011-06-01

发表刊物：PLASMA SOURCES SCIENCE & TECHNOLOGY

收录刊物：Scopus、SCIE、EI

卷号：20

期号：3,SI

ISSN号：0963-0252

摘要：With an implicit particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show complex relations to the electrode areas. Two-dimensional kinetic effects are also illuminated. Compared with the fluid model, PIC/MC model is numerical-diffusion-free and more detailed properties of the plasmas can be shown.