王友年

257

  • 教授     博士生导师   硕士生导师
  • 性别:男
  • 毕业院校:大连工学院
  • 学位:硕士
  • 所在单位:物理学院
  • 学科:等离子体物理
  • 办公地点:大连理工大学物理系楼306
  • 联系方式:0411-84707307
  • 电子邮箱:ynwang@dlut.edu.cn

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开通时间:2025.3.31

最后更新时间:2025.3.31

Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy

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论文类型:期刊论文

发表时间:2011-02-01

发表刊物:PLASMA SCIENCE & TECHNOLOGY

收录刊物:Scopus、SCIE、EI

卷号:13

期号:1

页面范围:61-67

ISSN号:1009-0630

关键字:dual frequency; capacitively coupled plasma; optical probe; plasma uniformity

摘要:Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small separate volume in plasma, thus enabling to diagnose the plasma uniformity for different experimental parameters. Both the gas pressure and the low-frequency (LF) power have apparent effects on the radial uniformity of argon plasma. With the increase in either pressure or LF power, the emission profiles changed from a bell-shaped to a double-peak distribution. The influence of a fused-silica ring around the electrodes on the plasma uniformity was also studied using the optical probe. Possible reasons that result in nonuniform plasmas in our experiments are discussed.