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论文类型：期刊论文

发表时间：2010-08-01

发表刊物：PLASMA SOURCES SCIENCE & TECHNOLOGY

收录刊物：SCIE

卷号：19

期号：4

ISSN号：0963-0252

摘要：We developed an implicit particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry for simulations of radio-frequency discharges, by introducing several numerical schemes which include variable weights and a multigrid field solver. Compared with the standard explicit models, we found that the computational efficiency is significantly increased and the accuracy is maintained. Numerical schemes are discussed and benchmark results are presented. The code can be used to simulate practical reactors.