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论文类型：期刊论文

发表时间：2009-06-01

发表刊物：PLASMA SCIENCE & TECHNOLOGY

收录刊物：SCIE

卷号：11

期号：3

ISSN号：1009-0630

关键字：dual frequency sheath; two-dimensional; numerical simulation

摘要：The characteristics of a collisional dual frequency (DF) sheath near an electrode with a cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependent fluid equations coupled with the Poisson equation and an equivalent-circuit model. The effects of the gas pressure on the two-dimensional profiles of the potential, electric field, ion fluid velocity in a DF sheath are investigated. The simulation results show that the cylindrical hole on the electrode has a significant influence on the DF sheath structure, i.e. , the sheath profile tends to wrap around the contour of the hole feature. Moreover, it is shown that the structure of the DF sheath is different from that of a single frequency (SF) sheath because the profile of the DF sheath is modulated by the combination of the high and low frequency sources. In addition the characteristics of the DF sheath are obviously are affected by the collisional effects in the DF sheath.