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论文类型：期刊论文

发表时间：2009-04-01

发表刊物：PHYSICS OF PLASMAS

收录刊物：SCIE、EI

卷号：16

期号：4

ISSN号：1070-664X

摘要：A one dimensional hybrid model has been proposed to study the Ar and CF(4) mixture gas in a dual-frequency (DF) capacitively coupled plasma. To achieve the more precise spatiotemporal distributions of the electric field and ions flux, the ion momentum equations are adopted instead of the drift-diffusion model with the effective electric field approximation. By adjusting DF sources, the evolutions of ions densities, ion energy distributions, and ion angular distributions are obtained and the modulation effects are discussed. Finally, the comparison between the simulation and experimental result shows that the hybrid model could qualitatively describe the characteristic of the mixtures in less time, which will be more promising in two dimensional and three dimensional simulations. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3125303]