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论文类型：期刊论文

发表时间：2008-02-01

发表刊物：PLASMA SCIENCE & TECHNOLOGY

收录刊物：SCIE、EI、CSCD

卷号：10

期号：1

页面范围：57-60

ISSN号：1009-0630

关键字：capacitively coupled plasmas; dual frequency; hydrodynamics; sheath

摘要：A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.