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射频及脉冲偏压对感应耦合等离子体动力学行为影响的研究

Release Time:2016-08-09  Hits:

Leading Scientist: 李雪春

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11175034

Date of Project Approval: 2011-09-25

Scheduled Completion Time: 2015-12-31

Date of Project Initiation: 2012-01-01

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