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反应性射频感应耦合等离子体中放电模式转换的研究

Release Time:2016-08-09  Hits:

Leading Scientist: 李雪春

Institution: 物理学院

Classification of Project: 大连理工大学理学学科研究基金项目

Status: 结题

Supported by: Dalian University of Technology

Nature of Project: 纵向

Project Approval Number: DUTSF200811

Date of Project Approval: 2008-07-15

Scheduled Completion Time: 2010-12-31

Date of Project Initiation: 2009-01-01

Date of Project Completion: 2010-12-31

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