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反应性射频感应耦合等离子体中放电模式转换的研究

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Leading Scientist:lixuechun

Status:结题

Supported by:大连理工大学

Nature of Project:纵向

Project Approval Number:DUTSF200811

Date of Project Approval:2008-07-15

Scheduled completion time:2010-12-31

Date of Project Initiation:2009-01-01

Date of Project Completion:2010-12-31

Next One:射频及脉冲偏压对感应耦合等离子体动力学行为影响的研究