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论文类型：期刊论文

发表时间：2010-04-19

发表刊物：VACUUM

收录刊物：SCIE、EI

卷号：84

期号：9

页面范围：1118-1122

ISSN号：0042-207X

关键字：Plasma immersion ion implantation; PET; Charging effects; Plasma sheath

摘要：The characteristics of sheath in a cylindrical Polyethylene terephthalate (PET) film for plasma immersion ion implantation (PIII) have been investigated numerically using a one-dimensional self-consistent fluid model. The time-dependent surface potential and the charge density accumulated on the inner surface of PET-film are obtained. The numerical results demonstrate that the charging effects lead to the reduction of surface potential during pulse on time, the implanted ions thus cannot reach the desirable energy. In order to diminish the influence of charging effects one can shorten the pulse fall time and thin the PET-film. (C) 2010 Elsevier Ltd. All rights reserved.