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高洁净度高真空半导体门阀研发项目

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Leading Scientist:马雅丽

Supported by:企事业单位委托科技项目

Status:结题

Supported by:沈阳富创精密设备股份有限公司

Nature of Project:横向

Date of Project Approval:2021-09-01

Scheduled completion time:2021-12-31

Date of Project Initiation:2021-09-01

Date of Project Completion:2023-03-07

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