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氮化硅基光子芯片的特殊工艺加工

Release Time:2021-03-29  Hits:

Leading Scientist: 崔岩

Institution: 机械工程学院

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: United Microelectronics Center Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2020-11-02

Scheduled Completion Time: 2021-07-31

Date of Project Initiation: 2020-11-02

Date of Project Completion: 2023-07-14

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