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氮化硅基光子芯片的特殊工艺加工

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Leading Scientist:崔岩

Supported by:企事业单位委托科技项目

Status:结题

Supported by:联合微电子中心有限责任公司

Nature of Project:横向

Date of Project Approval:2020-11-02

Scheduled completion time:2021-07-31

Date of Project Initiation:2020-11-02

Date of Project Completion:2023-07-14

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