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一种基于(110)单晶硅的微悬臂梁探针制作方法

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First Author:Yan Cui

Disigner of the Invention:赵林,wangfei,chengzihong

Application Number:CN201110055371.6

Authorization Date:2011-03-09

Authorization number:CN102279289A

Pre One:一种压电微悬臂梁探针的制作方法
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