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一种基于(110)单晶硅的微悬臂梁探针制作方法

Release Time:2019-03-09  Hits:

First Author: Yan Cui

Disigner of the Invention: 程子洪,王飞,赵林

Application Number: CN201110055371.6

Authorization Date: 2011-03-09

Authorization Number: CN102279289A

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