Study on the Subsurface Damage of Single Crystal MgO Substrates
Release Time:2022-10-19 Hits:
Date of Publication: 2022-10-09
Journal: 11th International Symposium on Advances in Abrasive Technology
Institution: 机械工程学院
Volume: 389-390
Page Number: 7-12
ISSN: 1013-9826