Release Time:2025-06-27 Hits:
Date of Publication: 2022-10-02
Journal: Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Institution: 机械工程学院
Volume: 39
Issue: 11
Page Number: 61-67
ISSN: 0577-6686
Prev One:Friction characteristic of wafer surface in chemical mechanical polishing
Next One:Generation of geometric measurement collision-free path for curved part