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基于强流脉冲离子束技术降低超硬多层薄膜残余应力的方法

Release Time:2022-10-19  Hits:

First Author: 陈军

Disigner of the Invention: 林莉,郝胜智,Lin Guoqiang,邢晶

Institution: 材料科学与工程学院

Application Number: CN102321874A

Authorization Number: CN201110299951.X

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