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基于强流脉冲离子束技术降低超硬多层薄膜残余应力的方法

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First Author:chenjun

Disigner of the Invention:Lin Li,haoshengzhi,Lin Guoqiang,邢晶

Affilication of Author(s):材料科学与工程学院

Application Number:CN102321874A

Authorization number:CN201110299951.X

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