Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2007-12-01

Journal: 2nd International Symposium on Functional Materials

Included Journals: Scopus、CPCI-S、EI、SCIE

Volume: T129

Page Number: 209-212

ISSN: 0031-8949

Abstract: Microforce sensors made of PT/PZT/PT thin films were designed in the micro-Newton range. The PT/PZT/PT thin films were deposited on the Pt/Ti/SiO2/Si substrate by the sol-gel process. Structure and the crystallinity of the deposited films were characterized. The sensing properties of the microforce sensors were measured in static state and in quasi-static state. The sensitivities of the microforce sensors with two different sizes were 0.004 and 0.040mV mu N-1 in the quasi-static state.