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PZT厚膜的电射流沉积研究

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Date of Publication:2022-10-08

Journal:传感器技术

Affiliation of Author(s):机械工程学院

Issue:2

Page Number:19-22

ISSN No.:1000-9787

Pre One:PZT压电薄膜无阀微泵的制备工艺及实验研究

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