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PZT压电薄膜无阀微泵的制备工艺及实验研究

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Date of Publication:2022-10-08

Journal:压电与声光

Affiliation of Author(s):机械工程学院

Issue:4

Page Number:492-494

ISSN No.:1004-2474

Pre One:Preparation and properties of PZT bimorph on metal substrate by hydrothermal method

Next One:PZT厚膜的电射流沉积研究
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