location: Current position: Home >> Scientific Research >> Paper Publications

Development of piezoelectric three-dimensional dynamometer for φ300mm wafer grinder

Hits:

Indexed by:会议论文

Date of Publication:2014-01-01

Volume:945

Page Number:2017-2020

Pre One:Design and Calibration of a Cutting Force Dynamometer

Next One:Development of piezoelectric three-dimensional dynamometer for 300mm wafer grinder