location: Current position: Home >> Scientific Research >> Paper Publications

Deposition of Si films by atmospheric pressure plasma jet in Ar/H2/SiCl4

Hits:

Indexed by:会议论文

Date of Publication:2010-01-01

Pre One:Stark broadening measurement of the electron density in an atmospheric pressure argon plasma jet with double-power electrodes

Next One:Characterization of Mode Coexistence in Argon Rf Discharge at Atmospheric Pressure