location: Current position: Home >> Scientific Research >> Paper Publications

Characterization of Mode Coexistence in Argon Rf Discharge at Atmospheric Pressure

Hits:

Indexed by:会议论文

Date of Publication:2010-01-01

Pre One:Deposition of Si films by atmospheric pressure plasma jet in Ar/H2/SiCl4

Next One:An Indirect Method for Measuring Electron Density of Atmospheric Pressure Plasma Jet