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Theoretical analysis of ion kinetic energies and DLC film deposition by CH4+Ar(He) dielectric barrier discharge plasmas

Release Time:2024-02-29  Hits:

Date of Publication: 2022-10-03

Journal: Chinese Phys

Institution: 物理学院

Volume: 16

Issue: 9

Page Number: 2809-2813

ISSN: 1009-1963

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