Effect of Transmission Line on Impedance Matching of Atmospheric-Pressure Radio-Frequency Capacitive Microplasma Discharge
Release Time:2024-02-29 Hits:
Date of Publication: 2022-10-02
Journal: IEEE TRANSACTIONS ON PLASMA SCIENCE
Institution: 物理学院
Volume: 42
Issue: 6
Page Number: 1654-1660
ISSN: 0093-3813