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用计算机控制的等离子体源离子渗氮工艺及设备

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First Author:dengxinlv

Disigner of the Invention:matengcai,Wang Dezhen,王延平,杨福宝,Wenqi Lu,zhangjialiang,阎海洋

Affilication of Author(s):物理学院

Application Number:CN1262341

Authorization number:CN99101568.1

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