Current position: Home >> Scientific Research >> Patents

一种教学用直流辉光放电探针诊断装置

Hits:

First Author:zhangyingying

Disigner of the Invention:YongXin Liu,zhangjialiang,JingLin Liu,licong,SONG Yuan-Hong

Affilication of Author(s):物理学院

Application Number:ZL202020219702.X

Pre One:用计算机控制的等离子体源离子渗氮工艺及设备

Next One:会切磁场约束ICP增强电离的非平衡磁控溅射薄膜沉积装置