Release Time:2019-03-09 Hits:
First Author: 刘艳红
Disigner of the Invention: 吕博嘉,刘爱民,马腾才,Liu Dongping
Application Number: CN200610134141.8
Authorization Date: 2006-10-31
Authorization Number: CN1948551
Prev One:一种β-碳化硅薄膜的制备方法