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介质阻挡放电等离子体热丝化学气相沉积的方法与装置

Release Time:2019-03-09  Hits:

First Author: 刘艳红

Disigner of the Invention: 吕博嘉,刘爱民,马腾才,Liu Dongping

Application Number: CN200610134141.8

Authorization Date: 2006-10-31

Authorization Number: CN1948551

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