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介质阻挡放电等离子体热丝化学气相沉积的方法与装置

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First Author:liuyanhong

Disigner of the Invention:Liu Dongping,matengcai,刘爱民,吕博嘉

Application Number:CN200610134141.8

Authorization Date:2006-10-31

Authorization number:CN1948551

Pre One:一种β－碳化硅薄膜的制备方法
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