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介质阻挡放电等离子体热丝化学气相沉积的方法与装置

Release Time:2022-10-19  Hits:

First Author: 刘艳红

Disigner of the Invention: Liu Dongping,马腾才,刘爱民,吕博嘉

Institution: 物理学院

Application Number: CN1948551

Authorization Number: CN200610134141.8

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