Current position: Home >> Scientific Research >> Patents

一种静电吸附式微质量传感器

Release Time:2019-03-09  Hits:

First Author: Shutian Liu

Disigner of the Invention: 黄毓,高仁璟,赵剑

Application Number: CN201120276967.4

Authorization Date: 2011-08-02

Authorization Number: CN202153147U

Prev One:一种非对称式变截面突跳机构

Next One:一种基于槽型悬臂梁结构的微质量传感器