Current position: Home >> Scientific Research >> Research Projects

射频感性耦合等离子体中与容性耦合有关的问题研究

Hits:

Leading Scientist:zfding

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:10675030

Date of Project Approval:2006-09-25

Scheduled completion time:2009-12-31

Date of Project Initiation:2007-01-01

Date of Project Completion:2009-12-31

Pre One:常压脉冲射频辉光等离子体中的物理机理与稳定控制研究

Next One:面向ITER的壁监测和杂质循环的在线动态行为研究