射频感应耦合Ar/N2 等离子体物理特性的Langmuir 探针测量及理论研究
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2008-01-01
Journal: 物理学报
Included Journals: ISTIC、PKU
Volume: 57
Issue: 8
Page Number: 5213-5215
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2008-01-01
Journal: 物理学报
Included Journals: ISTIC、PKU
Volume: 57
Issue: 8
Page Number: 5213-5215