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射频感应耦合Ar/N2 等离子体物理特性的Langmuir 探针测量及理论研究

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Indexed by:期刊论文

Date of Publication:2008-01-01

Journal:物理学报

Included Journals:PKU、ISTIC

Volume:57

Issue:8

Page Number:5213-5215

Pre One:Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges

Next One:ICPECVD类金刚石膜沉积过程的发射光谱诊断研究
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