Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2016-10-01

Journal: IEEE TRANSACTIONS ON PLASMA SCIENCE

Included Journals: Scopus、EI、SCIE

Volume: 44

Issue: 10

Page Number: 2282-2287

ISSN: 0093-3813

Key Words: Atmospheric pressure discharge; mode transition; pulse-modulated (PM) radio frequency (RF) discharge

Abstract: In pulse-modulated (PM) radio frequency (RF) atmospheric pressure glow discharges (APGDs), the alpha-gamma mode transition is analyzed and confirmed with I-V characteristic curve. The behaviors of alpha-gamma mode transition in PM RF APGDs are more complicated than that in continuous wave (CW) RF APGDs. In terms of amplitude of applied RF voltage just before a pulse falling edge (Vappls), the critical Vappls at the alpha-gamma mode transition in a PM RF APGD increases with the decreasing duty ratio and is higher than that of a CW RF APGD. The feature of the alpha-gamma mode transition in a PM RF APGD is attributed to the gas temperature rise depending on both the RF voltage and duty ratio. The alpha-gamma mode transition is verified to occur at the initial phase of a PM RF APGD and the onset is earlier at a higher transient RF voltage. As the mode transition occurs, a RF voltage spike is formed in the pulse waveform.