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Indexed by:期刊论文

Date of Publication:2012-08-01

Journal:REVIEW OF SCIENTIFIC INSTRUMENTS

Included Journals:SCIE、EI、PubMed

Volume:83

Issue:8

Page Number:085112

ISSN No.:0034-6748

Abstract:In this paper, the resonant rf magnetic probe is upgraded by replacing the rotary capacitor in the old version with the series-connected coaxial cable. The numerical calculation and the measurement with the prototype probe show that the rf magnetic probe can achieve resonance at a middle length of the series-connected coaxial cable. The good electrical symmetry of the new rf magnetic probe is ensured by both the identity of series-connected coaxial cables and the new structure of the primary winding. Practical measurements conduced on an rf inductively coupled plasma source demonstrate that performances of the new rf magnetic probe are good. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4746995]